Iindaba ze-Tibco, i-30 kaJuni, urhulumente waseDatshi wakhupha imimiselo yamva nje yokulawula ukuthumela ngaphandle kwezixhobo ze-semiconductor, ezinye imidiya zitolika oku njengokulawulwa kwe-photolithography ngokumelene neChina kwakhona kwanda kuyo yonke i-DUV.Ngapha koko, le migaqo mitsha yolawulo lokuthumela ngaphandle ijolise kwi-45nm ephezulu kunye nangaphantsi kobuchwephesha bokwenza itshiphu, kubandakanywa nezixhobo ze-alD zokubeka i-athomu ye-athomu, izixhobo zokukhula kwe-epitaxial, izixhobo zokubeka iplasma kunye neenkqubo zokuntywiliselwa kwe-lithography, kunye nethekhnoloji, isoftware esetyenzisiweyo. ukusebenzisa nokuphuhlisa ezo zixhobo ziphambili.
Kwisiteyitimenti esiya ku-Tibco, i-ASML igxininise ukuba imithetho emitsha yolawulo lokuthumela ngaphandle kukarhulumente waseDatshi igubungela kuphela ezinye zeemodeli zamva nje ze-DUV, kubandakanywa i-TWINSCAN NXT:2000i kunye neenkqubo zokuntywiliselwa ezilandelanayo zelithography.I-EUV lithography ibithintelwe ngaphambili, kwaye ukuthunyelwa kwezinye iinkqubo akulawulwa ngurhulumente waseDatshi.Ngokolwazi lwewebhusayithi ye-ASML esemthethweni, inkqubo ye-DUV immersion lithography, equka: TWINSCAN NXT:2050i, NXT:2050i, NXT:1980Di three lithography machine, ezi zingenza 38nm ~ 45nm process wafer processing.
Ukongeza, oomatshini bomileyo be-DUV lithography abakwazi ukwenza i-wafer processing ngaphezu kwe-45nm, njenge-65nm ~ 220nm inkqubo, njenge-TWINSCAN XT: 400L, XT: 1460K, NXT: 870, njl., ayiqukwanga kuluhlu lwezohlwayo zaseDutch.
Uluhlu lolawulo lwamaDatshi, njengoko luguqulelwe nguTibco, luhamba ngolu hlobo lulandelayo:
UMmiselo MinBuza.2023.15246-27 ekhutshwe nguMphathiswa wezoRhwebo lwaNgaphandle kunye neNtsebenziswano yoPhuhliso yaseNetherlands ibonelela ngeemfuno zelayisenisi yokuthunyelwa ngaphandle kwezixhobo zemveliso eziphambili ze-semiconductors ezingakhankanywanga ngaphambili kwiSihlomelo I soMmiselo onguNombolo 2021/821 (ngokunxulumene ne-semiconductor ephezulu izixhobo zokuvelisa)
Inqaku lesi-2: Lo mmiselo uthintela ukuthunyelwa kwezixhobo zokuvelisa ze-semiconductor eziphambili ezivela eNetherlands ngaphandle kwemvume yoMphathiswa.
Inqaku lesi-3:
1. Isicelo semvume ekhankanywe kwiSiqendu 2 siya kwenziwa ngumthengisi kwaye singeniswe kumtshutshisi.
2. Nakweyiphi na imeko, isicelo siya kuqulatha:
a）igama kunye nedilesi yomthengisi ngaphandle;
b）Igama kunye nedilesi yomamkeli kunye nomsebenzisi wokugqibela wesixhobo sokwenziwa kwe-semiconductor ephezulu;
c）Igama kunye nedilesi yomamkeli kunye nomsebenzisi wokugqibela wesixhobo sokwenziwa kwe-semiconductor ephezulu.
I-3, kuyo nayiphi na imeko, umtshutshisi unelungelo lokucela umthengisi ukuba anike isivumelwano sokuthumela ngaphandle, kunye nesitatimende ekusetyenzisweni kokuphela.
Inqaku lesi-4:
Iphepha-mvume elichazwe kwiSiqendu 2, linokuba phantsi kweemeko kunye nezibonelelo.
Ukunikezelwa kwelayisensi echazwe kwiNqaku lesi-2 kunokubakho kunye neziqinisekiso.
Inqaku V:
Iilayisensi ezikhankanywe kwiNqaku II zinokurhoxiswa kwezi meko zilandelayo:
a)Iphepha-mvume likhutshwe ngokusekelwe kulwazi olungachanekanga okanye olungaphelelanga;
b)Imiqathango, imiqathango kunye nezithintelo zelayisenisi ayizange ilandelwe;
c)Ngenxa yezizathu zomgaqo-nkqubo wesizwe wangaphandle nokhuseleko.
Ixesha lokuposa: Jul-02-2023